| Unit name | Nanofabrication for Quantum Engineering |
|---|---|
| Unit code | EENGM0026 |
| Credit points | 10 |
| Level of study | M/7 |
| Teaching block(s) |
Teaching Block 4 (weeks 1-24) |
| Unit director | Dr. Dondu Sahin |
| Open unit status | Not open |
| Pre-requisites |
None |
| Co-requisites |
Quantum Systems Engineering |
| School/department | School of Electrical, Electronic and Mechanical Engineering |
| Faculty | Faculty of Engineering |
The unit will provide theoretical and practical training to lay the foundations for nanofabrication, especially as it applies to photonic quantum information processing. Nanofabrication techniques and metrology tools will be covered in the lectures. A lithographic design tool (CAD) will be exploited to design lithographic masks. Practical sessions, comprising lithography, etching and microscopy tools, will provide students with extensive hands-on training.
Aim: To provide an overview of nano-engineering capabilities and challenges. To enable students to map a fabrication flow given a device idea. Understand system limitations, what can and cannot be made
Upon completion of this unit, students should:
Please include reference to any distance learning or any significant e-learning components, if appropriate.
The course will consist of graduate style lectures and practical experience in the cleanroom/lab environment.
This will be based on a 20-minute presentation (60%) and 2000-word report (40%).
1- "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, 3rd edition, CRC Press (2011) International Standard Book Number-13: 978-1-4398-9530-6 (eBook - PDF)
2- “Introduction to Solid state physics”, Charles Kittel, Wiley
3- “Solid State Electronic Devices”, Ben Streetman and Sanjay Banerjee, 7th edition (2015)
