Skip to main content

Unit information: Nanofabrication for Quantum Engineering in 2019/20

Please note: Due to alternative arrangements for teaching and assessment in place from 18 March 2020 to mitigate against the restrictions in place due to COVID-19, information shown for 2019/20 may not always be accurate.

Please note: you are viewing unit and programme information for a past academic year. Please see the current academic year for up to date information.

Unit name Nanofabrication for Quantum Engineering
Unit code EENGM0026
Credit points 10
Level of study M/7
Teaching block(s) Teaching Block 4 (weeks 1-24)
Unit director Dr. Dondu Sahin
Open unit status Not open



Quantum Systems Engineering

School/department Department of Electrical & Electronic Engineering
Faculty Faculty of Engineering


The unit will provide theoretical and practical training to lay the foundations for nanofabrication, especially as it applies to photonic quantum information processing. Nanofabrication techniques and metrology tools will be covered in the lectures. A lithographic design tool (CAD) will be exploited to design lithographic masks. Practical sessions, comprising lithography, etching and microscopy tools, will provide students with extensive hands-on training.

Aim: To provide an overview of nano-engineering capabilities and challenges. To enable students to map a fabrication flow given a device idea. Understand system limitations, what can and cannot be made

Intended learning outcomes

Upon completion of this unit, students should:

  • Experience of a range of nano fabrication and characterisation techniques
  • Be able to develop a workflow for the cleanroom process
  • Be able to plan their resources for a given nanofabrication process
  • Be able to identify what metrology tools will be required
  • Familiarity with designing lithography masks -
  • Appreciation of CMOS fabrication

Teaching details

Please include reference to any distance learning or any significant e-learning components, if appropriate.

The course will consist of graduate style lectures and practical experience in the cleanroom/lab environment.

Assessment Details

This will be based on a 20-minute presentation (60%) and 2000-word report (40%).

Reading and References

1- "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, 3rd edition, CRC Press (2011) International Standard Book Number-13: 978-1-4398-9530-6 (eBook - PDF)

2- “Introduction to Solid state physics”, Charles Kittel, Wiley

3- “Solid State Electronic Devices”, Ben Streetman and Sanjay Banerjee, 7th edition (2015)