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Unit information: Nanofabrication for Quantum Engineering in 2020/21

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Unit name Nanofabrication for Quantum Engineering
Unit code EENGM0026
Credit points 10
Level of study M/7
Teaching block(s) Teaching Block 4 (weeks 1-24)
Unit director Dr. Jon Pugh
Open unit status Not open



Quantum Systems Engineering

School/department Department of Electrical & Electronic Engineering
Faculty Faculty of Engineering


The unit will provide theoretical and practical training to lay the foundations for nanofabrication, especially as it applies to photonic quantum information processing. Nanofabrication techniques and metrology tools will be covered in the lectures. A lithographic design tool (CAD) will be exploited to design lithographic masks. Practical sessions, comprising lithography, etching and microscopy tools, will provide students with extensive hands-on training.

Aim: To provide an overview of nano-engineering capabilities and challenges. To enable students to map a fabrication flow given a device idea. Understand system limitations, what can and cannot be made

Intended learning outcomes

Upon completion of this unit, students should:

  • Experience of a range of nano fabrication and characterisation techniques
  • Be able to develop a workflow for the cleanroom process
  • Be able to plan their resources for a given nanofabrication process
  • Be able to identify what metrology tools will be required
  • Familiarity with designing lithography masks -
  • Appreciation of CMOS fabrication

Teaching details

Teaching will be delivered through a combination of synchronous and asynchronous sessions, including lectures, practical activities supported by drop-in sessions, problem sheets and self-directed exercises.

Assessment Details

3000 word report on the mini project, weighted at 100%

Reading and References

1- "Fundamentals of Microfabrication and Nanotechnology, Volume II, Manufacturing Techniques for Microfabrication and Nanotechnology", Marc J. Madou, 3rd edition, CRC Press (2011) International Standard Book Number-13: 978-1-4398-9530-6 (eBook - PDF)

2- “Introduction to Solid state physics”, Charles Kittel, Wiley

3- “Solid State Electronic Devices”, Ben Streetman and Sanjay Banerjee, 7th edition (2015)