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Unit information: Nanofabrication for Quantum Engineering in 2022/23

Please note: It is possible that the information shown for future academic years may change due to developments in the relevant academic field. Optional unit availability varies depending on both staffing, student choice and timetabling constraints.

Unit name Nanofabrication for Quantum Engineering
Unit code EENGM0026
Credit points 10
Level of study M/7
Teaching block(s) Teaching Block 4 (weeks 1-24)
Unit director Dr. Jon Pugh
Open unit status Not open



Quantum Systems Engineering

School/department Department of Electrical & Electronic Engineering
Faculty Faculty of Engineering


The unit will provide theoretical and practical training to lay the foundations for nanofabrication, especially as it applies to photonic quantum information processing. Nanofabrication techniques and metrology tools will be covered in the lectures. A lithographic design tool (CAD) will be exploited to design lithographic masks. Practical sessions, comprising lithography, etching and microscopy tools, will provide students with extensive hands-on training.

Aim: To provide an overview of nano-engineering capabilities and challenges. To enable students to map a fabrication flow given a device idea. Understand system limitations, what can and cannot be made

Intended learning outcomes

Upon completion of this unit, students should:

  • Experience of a range of nano fabrication and characterisation techniques
  • Be able to develop a workflow for the cleanroom process
  • Be able to plan their resources for a given nanofabrication process
  • Be able to identify what metrology tools will be required
  • Familiarity with designing lithography masks -
  • Appreciation of CMOS fabrication

Teaching details

Teaching will be delivered through a combination of synchronous and asynchronous sessions, including lectures, practical activities supported by drop-in sessions, problem sheets and self-directed exercises.

Assessment Details

3000 word report on the mini project, weighted at 100%


If this unit has a Resource List, you will normally find a link to it in the Blackboard area for the unit. Sometimes there will be a separate link for each weekly topic.

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